JPH02125329U - - Google Patents
Info
- Publication number
- JPH02125329U JPH02125329U JP3528989U JP3528989U JPH02125329U JP H02125329 U JPH02125329 U JP H02125329U JP 3528989 U JP3528989 U JP 3528989U JP 3528989 U JP3528989 U JP 3528989U JP H02125329 U JPH02125329 U JP H02125329U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- semiconductor wafers
- entrance
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 4
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3528989U JPH02125329U (en]) | 1989-03-27 | 1989-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3528989U JPH02125329U (en]) | 1989-03-27 | 1989-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02125329U true JPH02125329U (en]) | 1990-10-16 |
Family
ID=31540510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3528989U Pending JPH02125329U (en]) | 1989-03-27 | 1989-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02125329U (en]) |
-
1989
- 1989-03-27 JP JP3528989U patent/JPH02125329U/ja active Pending
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